MEMS and NEMS : systems, devices, and structures / Sergey Edward Lyshevski.
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
Boca Raton, FL :
CRC Press,
2001.
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| Series: | Nano- and microscience, engineering, technology, and medicine series
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| Subjects: | |
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