MEMS and MOEMS technology and applications / P. Rai-Choudhury, editor.
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| Other Authors: | |
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| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Wash. :
SPIE Optical Engineering Press,
c2000.
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| Series: | SPIE Press monograph ;
PM85 |
| Subjects: | |
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