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High resolution focused ion beams : FIB and its applications : the physics of liquid metal ion sources and ion optics and their application to focused ion beam technology / Jon Orloff, Mark Utlaut and Lynwood Swanson. FIB and its applications : the physics of liquid metal ion sources and ion optics and their application to focused ion beam technology /
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| Format: | Book |
| Language: | English |
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New York ; London :
Kluwer Academic/Plenum,
2002.
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Pilkington Library
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Shelfmark:
530.41/ORL |
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Copy [0402684176]
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