Micromachining technology for micro-optics and nano-optics : 28-29 January 2003 San Jose, California, USA / Eric G. Johnson chair/editor.
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| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Wash. :
SPIE,
2003.
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| Series: | SPIE proceedings series
Vol. 4984 |
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