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Engineering thin films and nanostructures with ion beams / edited by Emile Knystautas.

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Bibliographic Details
Other Authors: Knystautas, Emile J.
Format: Book
Language:English
Published: New York : Marcel Dekker/CRC Press, 2005.
Series:Optical engineering (Marcel Dekker, Inc.) ; v. 92
Subjects:
Thin films
Nanostructures
Ion bombardment > Industrial applications
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