Handbook of semiconductor silicon technology / edited by William C. O'Mara, Robert B. Herring, Lee P. Hunt.

A summary of the science, technology, and manufacturing of semiconductor silicon materials. Properties of silicon are detailed, and a set of silicon binary phase diagrams is included. Other aspects such as materials handling, safety, impurity, and defect reduction are also discussed.

Bibliographic Details

Other Authors:	O'Mara, William C., Herring, Robert B., Hunt, Lee P. (Lee Philip)
Format:	Book
Language:	English
Published:	New York, N.Y. : Noyes, 1990.
Edition:	Reprint ed.
Series:	Materials science and process technology series
Subjects:	Semiconductors > Handbooks, manuals, etc. Silicon crystals > Handbooks, manuals, etc.
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