Fundamental principles of engineering nanometrology Richard K. Leach.

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Bibliographic Details
Main Author: Leach, Richard
Format: eBook
Language:English
Published: Amsterdam : William Andrew, c2010.
Series:Micro and nano technologies
Subjects:
Online Access:https://www.vlebooks.com/vleweb/product/openreader?id=LBORO&isbn=9781437778328
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