Perspective technologies and methods in MEMS design proceeding of the IIId International Conference of Young Scientists, MEMSTECH 2007, 23-26 May 2007, Lviv-Polyana, Ukraine.
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| Corporate Authors: | , , |
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| Format: | eBook |
| Language: | English |
| Published: |
Lviv :
Publishing House of Lviv Polytechnic National University,
2007.
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| Subjects: | |
| Online Access: | http://ieeexplore.ieee.org/servlet/opac?punumber=4283407 |
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