15th IEEE International Conference on Advanced Thermal Processing of Semiconductors RTP 2007 : October 2-5, 2007, Grand Hotel Baia Verde, Catania, Italy / IEEE Electron Devices Society. RTP 2007 : October 2-5, 2007, Grand Hotel Baia Verde, Catania, Italy /

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Bibliographic Details
Corporate Authors: IEEE International Conference on Advanced Thermal Processing of Semiconductors Catania, Italy, IEEE Electron Devices Society
Format: eBook
Language:English
Published: Piscataway, NJ : IEEE, c2007.
Subjects:
Semiconductors > Heat treatment > Congresses.
Rapid thermal processing > Congresses.
Semiconductor doping > Congresses.
Semiconductors > Defects > Congresses.
Online Access:http://ieeexplore.ieee.org/servlet/opac?punumber=4383794
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