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Transducers '07, Lyon & Eurosensors XXI the 14th International Conference on Solid-State Sensors, Actuators, and Microsystems : Cite I Centre des Congres, Lyon, France, June 10-14, 2007 : digest of technical papers / sponsored by CEA-Leti-Minatec ; technical co-sponsors, IEEE, IEEE Electron Devices Society, Elsevier. the 14th International Conference on Solid-State Sensors, Actuators, and Microsystems : Cite I Centre des Congres, Lyon, France, June 10-14, 2007 : digest of technical papers /
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Format: | eBook |
Language: | English |
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Piscataway, NJ :
IEEE,
c2007.
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Online Access: | http://ieeexplore.ieee.org/servlet/opac?punumber=4300055 |
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