Advanced Semiconductor Manufacturing Conference, 2007, ASMC 2007, IEEE/SEMI 11-12 June 2007. 11-12 June 2007.

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Bibliographic Details
Corporate Authors: IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop Stresa, Italy, Institute of Electrical and Electronics Engineers, Semiconductor Equipment and Materials International, IEEE Xplore (Online service)
Format: eBook
Language:English
Published: Piscataway, N.J. : IEEE Xplore, 2007.
Subjects:
Semiconductor industry > Congresses.
Semiconductors > Design and construction > Congresses.
Process control > Congresses.
Online Access:http://ieeexplore.ieee.org/servlet/opac?punumber=4259214
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