Technical digest 20th IEEE International Conference on Micro Electro Mechanical Systems : MEMS 2007 Kobe : January 21-25, 2007. 20th IEEE International Conference on Micro Electro Mechanical Systems : MEMS 2007 Kobe : January 21-25, 2007.

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Bibliographic Details
Corporate Authors: IEEE International Conference on Micro Electro Mechanical Systems Kobe-shi, Japan, Institute of Electrical and Electronics Engineers
Format: eBook
Language:English
Published: Piscataway, NJ : IEEE, c2007.
Subjects:
Microelectromechanical systems > Congresses.
Online Access:http://ieeexplore.ieee.org/servlet/opac?punumber=4432954
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