IEEE International Conference on Micro Electro Mechanical Systems Kobe-shi, Japan, & Institute of Electrical and Electronics Engineers. (2007). Technical digest 20th IEEE International Conference on Micro Electro Mechanical Systems : MEMS 2007 Kobe : January 21-25, 2007: 20th IEEE International Conference on Micro Electro Mechanical Systems : MEMS 2007 Kobe : January 21-25, 2007. IEEE.
Chicago Style (17th ed.) CitationIEEE International Conference on Micro Electro Mechanical Systems Kobe-shi, Japan, and Institute of Electrical and Electronics Engineers. Technical Digest 20th IEEE International Conference on Micro Electro Mechanical Systems : MEMS 2007 Kobe : January 21-25, 2007: 20th IEEE International Conference on Micro Electro Mechanical Systems : MEMS 2007 Kobe : January 21-25, 2007. Piscataway, NJ: IEEE, 2007.
MLA (9th ed.) CitationIEEE International Conference on Micro Electro Mechanical Systems Kobe-shi, Japan, and Institute of Electrical and Electronics Engineers. Technical Digest 20th IEEE International Conference on Micro Electro Mechanical Systems : MEMS 2007 Kobe : January 21-25, 2007: 20th IEEE International Conference on Micro Electro Mechanical Systems : MEMS 2007 Kobe : January 21-25, 2007. IEEE, 2007.