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Technical digest 20th IEEE International Conference on Micro Electro Mechanical Systems : MEMS 2007 Kobe : January 21-25, 2007. 20th IEEE International Conference on Micro Electro Mechanical Systems : MEMS 2007 Kobe : January 21-25, 2007.
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Corporate Authors: | , |
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Format: | eBook |
Language: | English |
Published: |
Piscataway, NJ :
IEEE,
c2007.
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Subjects: | |
Online Access: | http://ieeexplore.ieee.org/servlet/opac?punumber=4432954 |
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Item Description: | Includes bibliographical references. "IEEE catalog number: 07CH37871." |
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