ISSM 2006 conference proceedings : the Thirteenth International Symposium on Semiconductor Manufacturing : September 25-27, 2006, Century Hyatt Tokyo, Tokyo, Japan / sponsored by the Japan Society of Applied Physics (JSAP), IEEE Electron Devices Society, Semiconductor Equipment and Materials International (SEMI).

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Bibliographic Details
Corporate Authors: International Symposium on Semiconductor Manufacturing Tokyo, Japan, Oyo Butsuri Gakkai, IEEE Electron Devices Society, Semiconductor Equipment and Materials International
Format: eBook
Language:English
Published: Tokyo, Japan : Semiconductor Portal, Inc., c2006.
Subjects:
Semiconductors > Design and construction > Congresses.
Semiconductor industry > Congresses.
Computer integrated manufacturing systems > Congresses.
Online Access:http://ieeexplore.ieee.org/servlet/opac?punumber=4479864
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