International Symposium on Semiconductor Manufacturing Tokyo, Japan, Oyo Butsuri Gakkai, IEEE Electron Devices Society, & Semiconductor Equipment and Materials International. (2006). ISSM 2006 conference proceedings : the Thirteenth International Symposium on Semiconductor Manufacturing : September 25-27, 2006, Century Hyatt Tokyo, Tokyo, Japan / sponsored by the Japan Society of Applied Physics (JSAP), IEEE Electron Devices Society, Semiconductor Equipment and Materials International (SEMI): Conference proceedings : the Thirteenth International Symposium on Semiconductor Manufacturing : September 25-27, 2006, Century Hyatt Tokyo, Tokyo, Japan. Semiconductor Portal, Inc..
Chicago Style (17th ed.) CitationInternational Symposium on Semiconductor Manufacturing Tokyo, Japan, Oyo Butsuri Gakkai, IEEE Electron Devices Society, and Semiconductor Equipment and Materials International. ISSM 2006 Conference Proceedings : The Thirteenth International Symposium on Semiconductor Manufacturing : September 25-27, 2006, Century Hyatt Tokyo, Tokyo, Japan / Sponsored by the Japan Society of Applied Physics (JSAP), IEEE Electron Devices Society, Semiconductor Equipment and Materials International (SEMI): Conference Proceedings : The Thirteenth International Symposium on Semiconductor Manufacturing : September 25-27, 2006, Century Hyatt Tokyo, Tokyo, Japan. Tokyo, Japan: Semiconductor Portal, Inc., 2006.
MLA (9th ed.) CitationInternational Symposium on Semiconductor Manufacturing Tokyo, Japan, et al. ISSM 2006 Conference Proceedings : The Thirteenth International Symposium on Semiconductor Manufacturing : September 25-27, 2006, Century Hyatt Tokyo, Tokyo, Japan / Sponsored by the Japan Society of Applied Physics (JSAP), IEEE Electron Devices Society, Semiconductor Equipment and Materials International (SEMI): Conference Proceedings : The Thirteenth International Symposium on Semiconductor Manufacturing : September 25-27, 2006, Century Hyatt Tokyo, Tokyo, Japan. Semiconductor Portal, Inc., 2006.