Micromechanics and MEMS classic and seminal papers to 1990 / edited by William S. Trimmer.
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| Format: | eBook |
| Language: | English |
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New York :
IEEE Press,
1997.
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| Online Access: | http://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5273520 |
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