Handbook of chemical vapor deposition (CVD) : principles, technology, and applications / by Hugh O. Pierson.
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
Norwich, NY :
Noyes Publications,
c1999.
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| Edition: | 2nd ed. |
| Series: | Materials science and process technology series. Electronic materials and process technology.
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| Subjects: | |
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