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Microsystem design / Stephen D...
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Microsystem design / Stephen D. Senturia.
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Bibliographic Details
Main Author:
Senturia, Stephen D., 1940-
(Author)
Format:
Book
Language:
English
Published:
New York :
Springer,
[2013]
Subjects:
Microelectromechanical systems
>
Design and construction.
System design.
Microelectronics.
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