Principles of microelectromechanical systems / Ki Bang Lee.
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Format: | eBook |
Language: | English |
Published: |
Hoboken, New Jersey :
WILEY/IEEE Press,
c2011.
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Online Access: | http://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5628438 |
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http://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5628438Online Resource
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Copy [B526875]
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