Principles of microelectromechanical systems / Ki Bang Lee.
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| Main Author: | |
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| Format: | eBook |
| Language: | English |
| Published: |
Hoboken, New Jersey :
WILEY/IEEE Press,
c2011.
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| Subjects: | |
| Online Access: | http://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5628438 |
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