Semiconductor fabrication technology and metrology / Dinesh C. Gupta, editor.

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Bibliographic Details
Corporate Authors: International Symposium on Semiconductor Processing. Santa Clara, Calif., American Society for Testing and Materials, ASTM Committee F-1 on Electronics, Semiconductor Equipment and Materials International, National Institute of Standards and Technology (U.S.)
Other Authors: Gupta, Dinesh C. (ed.)
Format: eBook
Language:English
Published: Philadelphia, Pa. : American Society for Testing and Materials, c1989.
Series:Journalof ASTM International. STP 990.
Subjects:
Semiconductors > Design and construction > Congresses.
Metallizing > Congresses.
Segregation > Congresses.
Online Access:https://compass.astm.org/document/?contentCode=ASTM%7CSTP990-EB%7Cen-US
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