Gate dielectric integrity material, process, and tool qualification / Dinesh C. Gupta and George A. Brown, editors.

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Bibliographic Details
Corporate Authors: Conference on Gate Dielectric Integrity San Jose, Calif., ASTM Committee F-1 on Electronics, ASTM International
Other Authors: Gupta, D. C. (Dinesh C.) (ed.), Brown, George A., 1937- (ed.)
Format: eBook
Language:English
Published: West Conshohocken, Pa. : ASTM International, c2000.
Series:Journal of ASTM International. STP 1382.
Subjects:
Semiconductors > Congresses.
Integrated circuits > Wafer-scale integration > Congresses.
Gate array circuits > Congresses.
Silicon oxide films > Congresses.
Dielectrics > Congresses.
Online Access:https://compass.astm.org/document/?contentCode=ASTM%7CSTP1382-EB%7Cen-US
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