Principles of plasma discharges and materials processing Michael A. Lieberman, Allan J. Lichtenberg.
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| Main Author: | |
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| Format: | eBook |
| Language: | English |
| Published: |
Hoboken, N.J. :
Wiley-Interscience,
c2005.
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| Edition: | 2nd ed. |
| Subjects: | |
| Online Access: | http://dx.doi.org/10.1002/0471724254 |
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