Micro process engineering fundamentals, devices, fabrication, and applications / edited by Norbert Kockmann.
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| Other Authors: | |
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| Format: | eBook |
| Language: | English |
| Published: |
Weinheim : Chichester :
Wiley-VCH distributor ; John Wiley,
2006.
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| Series: | Advanced micro and nanosystems ;
v.5 |
| Subjects: | |
| Online Access: | http://dx.doi.org/10.1002/9783527616749 |
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