900-channel single-shot surface roughness measurement using hyperspectral interferometry

A recently developed hyperspectral interferometer has been applied, for the first time, to the single-shot measurement of surface roughness. Traditional optical surface profiling techniques, such as coherence scanning interferometry (CSI) or focus variation microscopy, require long scan times and me...

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Bibliographic Details
Main Authors: Tobias Reichold, Pablo Ruiz, Jonathan Huntley
Format: Default Article
Published: 2020
Subjects:
Optics
Physical Sciences
Engineering
Rough surface quality control
Single-shot
Hyperspectral interferometry
Dimensional metrology
Online Access:https://hdl.handle.net/2134/11317616.v1
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