Performance evaluation of a robot-mounted interferometer for an industrial environment

High value manufacturing requires production-integrated, fast, multi-sensor and multi-scale inspection. To meet this need, the robotic deployment of sensors within the factory environment is becoming increasingly popular. For microscale measurement applications, robot-mountable versions of high-reso...

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Bibliographic Details
Main Authors: Istvan Biro, Peter Kinnell
Format: Default Article
Published: 2020
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Online Access:https://hdl.handle.net/2134/11522709.v1
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