A multi-sensing scheme based on nonlinear coupled micromachined resonators

A new multi-sensing scheme via nonlinear weakly coupled resonators is introduced in this paper, which can simultaneously detect two different physical stimuli by monitoring the dynamic response around the first two lowest modes. The system consists of a mechanically coupled bridge resonator and cant...

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Bibliographic Details
Main Authors: Zhengliang Fang, Stephanos Theodossiades, Laura Ruzziconi, Amal Hajjaj
Format: Default Article
Published: 2023
Subjects:
Engineering
Mathematical sciences
Micro-electromechanical systems (MEMS)
Multi-sensing
Nonlinear dynamics
Electrostatic actuation
Mechanically coupled resonators
Online Access:https://hdl.handle.net/2134/21976958.v1
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https://hdl.handle.net/2134/21976958.v1

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