Multi-Gas Sensing Design based on Nonlinear Coupled Micromachined Resonators

Micro-electromechanical (MEMS) gas sensors receive increasing interest thanks to the high demand for environmental monitoring, air quality measurement, chemical process control, and personal safety. Extensive research has been conducted to improve the selectivity and sensitivity of gas sensors. Howe...

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Bibliographic Details
Main Authors: Zhengliang Fang, Stephanos Theodossiades, Amal Hajjaj
Format: Default Conference proceeding
Published: 2024
Subjects:
Micro-electromechanical (MEMS)
Multi-Sensing
Gas sensor
European Nonlinear Dynamics Conference
ENOC
Online Access:https://dx.doi.org/10.17028/rd.lboro.25013972.v1
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https://dx.doi.org/10.17028/rd.lboro.25013972.v1

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