Gas Sensor Based on Nonlinear Coupled AlN-Piezoelectric Micromachined Resonators

This paper reports a novel Aluminium-Nitride (AlN)-based piezoelectric micromachined gas sensor relying on thermal energy dissipation (heating or cooling) of an electrically heated weakly coupled resonator. The coupled MEMS resonator, consisting of a bridge and cantilever resonators mechanically cou...

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Bibliographic Details
Main Authors: Zhengliang Fang, Stephanos Theodossiades, Nizar Jaber, Amal Hajjaj
Format: Default Conference proceeding
Published: 2024
Subjects:
MEMS
Nonlinear Dynamics
AlN Piezoelectric
Gas Sensing
Weakly coupled resonators
Online Access:https://dx.doi.org/10.17028/rd.lboro.25014014.v1
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