Dynamics of a Piezoelectric MEMS Gas Sensor Based on Coupled Micromachined Resonators

This work discusses the dynamics of MEMS structures; including a single cantilever, a single clamped beam, and a mechanically coupled cantilever and bridge resonator; actuated by Aluminum Nitride (AlN) layer, exploring the potential of coupled systems in gas sensing application. The pure AC actuatio...

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Bibliographic Details
Main Authors: Zhengliang Fang, Stephanos Theodossiades, Fasil Dejene, Amal Hajjaj
Format: Default Conference proceeding
Published: 2024
Subjects:
MEMS
Nonlinear Dynamics
AlN-Piezoelectrics
Gas Sensing
Weakly coupled resonators
Micro and Nanotechnology for Power Generation and Energy Conversion Applications
PowerMEMS
Online Access:https://dx.doi.org/10.17028/rd.lboro.25014020.v1
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https://dx.doi.org/10.17028/rd.lboro.25014020.v1

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