Triple sensing scheme based on nonlinear coupled micromachined resonators

In the past few decades, advances in micro-electromechanical systems (MEMS) have produced robust, accurate, and high-performance devices. Extensive research has been conducted to improve the selectivity and sensitivity of MEMS sensors by adjusting the device dimensions and adopting nonlinear feature...

Full description

Saved in:
Bibliographic Details
Main Authors: Zhengliang Fang, Stephanos Theodossiades, Amal Hajjaj
Format: Default Article
Published: 2023
Subjects:
Engineering
Mathematical sciences
Acoustics
Micro-electromechanical systems (MEMS)
Multi-sensing
Nonlinear dynamics
Electrostatic actuation
Weakly coupled resonators
Online Access:https://hdl.handle.net/2134/25226732.v1
Tags: Add Tag
No Tags, Be the first to tag this record!

Internet

https://hdl.handle.net/2134/25226732.v1

Similar Items