Measuring coefficient of thermal expansion of materials of micrometre size using SEM/FIB microscope with in situ MEMS heating stage

A new method is proposed to measure the linear coefficient of thermal expansion (CTE) of solid metals and ceramics of micron‐sized dimensions. This approach uses a focused ion beam (FIB) to extract and transfer a slab of the sample, typically (15–20) ×10 × (3–5) µm onto a Micro‐Electro‐Mechanical Sy...

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Bibliographic Details
Main Authors: Stuart Robertson, Andrew McClintock, Kenny Jolley, Han Zhou, Sam Davis, Houzheng Wu, Changqing Liu, Scott Doak, Zhaoxia Zhou
Format: Default Article
Published: 2024
Subjects:
Biochemistry and cell biology
Physical chemistry
Materials engineering
Condensed matter physics
Coefficient of thermal expansion
Copper
CTE
Graphite
In situ MEMs heating
SEM/FIB
Online Access:https://hdl.handle.net/2134/25416280.v1
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