Modeling of coherence scanning interferometry using classical Fourier optics

We propose a model for coherence scanning interferometry using familiar Fourier optics methods and the spectrum of plane waves for the case where light source spectral bandwidth limits the fringe contrast as a function of optical path length. The model is straightforward to implement, is computation...

Full description

Bibliographic Details

Main Authors:	Peter de Groot, Xavier Colonna de Lega, Rong Su, Jeremy Coupland, Richard Leach
Format:	Default Article
Published:	2021
Subjects:	Engineering Electrical engineering Information and computing sciences Computer vision and multimedia computation Atomic, molecular and optical physics Interferometry Interferometer Metrology Topography Coherence scanning interferometry Fourier optics
Online Access:	https://hdl.handle.net/2134/25450033.v1
Tags:	Add Tag No Tags, Be the first to tag this record!