Enhancing sensitivity using frequency localization factor in gas sensor based antisymmetric weakly coupled resonators

This study presents an antisymmetric weakly coupled aluminum nitride (AIN)-piezoelectric MEMS gas sensor for nitrogen concentration detection in helium. The sensor's design uses mechanically weakly coupled bridge and cantilever resonators to monitor changes in surrounding gas thermal conductivi...

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Bibliographic Details
Main Authors: Haythem Draoui, Zhengliang Fang, Stephanos Theodossiades, Antonio Di Buono, Amal Hajjaj
Format: Default Conference proceeding
Published: 2024
Subjects:
MEMS
Nonlinear Dynamics
AlN-Piezoelectric
Gas Sensing
Weakly Coupled Resonators
Frequency Localization Factor
Online Access:https://hdl.handle.net/2134/28450682.v1
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