Exploiting nonlinearity of micromachined antisymmetric weakly coupled resonators toward multifunctional sensors

In the past few years, the topic of multiple sensing has received more attention due to the increasing demand for multiple physical, chemical, and environmental parameters sensing applications. The traditional solution for multiple physical parameters’ sensing normally integrates different kinds of...

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Bibliographic Details
Main Author: Zhengliang Fang
Format: Default Thesis
Published: 2025
Subjects:
MEMS
TPoS resonator
Gas sensor
Electrostatic actuation
Nonlinear dynamics
Frequency Tunability
Antisymmetric weakly mechanically coupled resonators
Buckling
Veering
Low power consumption
Multi-sensing
Online Access:https://dx.doi.org/10.26174/thesis.lboro.29368562.v1
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