Facile fabrication of highly conductive and dense indium tin oxide targets by cold sintering assisted process

Indium tin oxide (ITO) ceramic sputtering targets are widely used to produce electrically conductive transparent thin films for various optoelectronic devices. However, it is challenging to produce high quality targets due to the poor sinterability of ITO powders. Conventional sintering of polycryst...

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Bibliographic Details
Main Authors: Tong Yu, Xujin Bao, Benshuang Sun, Zhaoxia Zhou, Hongtao Zhang
Format: Default Article
Published: 2025
Subjects:
Macromolecular and materials chemistry
Materials engineering
Nanotechnology
Indium tin oxide
Cold sintering process
Post-annealing
Electrical resistivity
Online Access:https://hdl.handle.net/2134/30802946.v1
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