Micro- and submicrostructuring thin polymer films with two and three-beam single pulse laser interference lithography

In this work we report the application of two and three-beam single pulse laser interference lithography to thin polymer films of poly(trimethylene terephthalate) (PTT). By irradiating the sample surface with temporary and spatially overlapped single pulses from two or three coherent beams and chang...

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Bibliographic Details
Main Authors: Ignacio Martin-Fabiani, Stephen Riedel, Daniel R. Rueda, Jan Siegel, Johannes Boneberg, Tiberio A. Ezquerra, Aurora Nogales
Format: Default Article
Published: 2014
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Online Access:https://hdl.handle.net/2134/26696
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