On the assessment by grazing-incidence small-angle X-ray scattering of replica quality in polymer gratings fabricated by nanoimprint lithography

Grazing-incidence small-angle X-ray scattering (GISAXS) can be used to characterize the replica quality of polymer gratings prepared by thermal nanoimprint lithography (NIL). Here it is shown using GISAXS experiments that a series of NIL polymer gratings with different line quality present character...

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Main Authors:	M. Soccio, N. Alayo, Ignacio Martin-Fabiani, Daniel R. Rueda, Mari-Cruz Garcia-Gutierrez, Esther Rebollar, D.E. Martinez-Tong, F. Perez-Murano, Tiberio A. Ezquerra
Format:	Default Article
Published:	2014
Subjects:	Materials engineering not elsewhere classified untagged Materials Engineering not elsewhere classified
Online Access:	https://hdl.handle.net/2134/26699
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