Soft nanolithography by polymer fibers

We report on the use of polymer fibers for large-area soft nanolithography on organic and inorganic surfaces with 50 nm resolution. The morphology of fibers and of the corresponding patterned gap is investigated, demonstrating a lateral dimension downscaling of up to nine times, which greatly increa...

Full description

Saved in:
Bibliographic Details
Main Authors: Deyu Tu, Stefano Pagliara, Andrea Camposeo, Giovanni Potente, Elisa Mele, Roberto Cingolani, Dario Pisignano
Format: Default Article
Published: 2011
Subjects:
Online Access:https://hdl.handle.net/2134/17815
Tags: Add Tag
No Tags, Be the first to tag this record!