Soft nanolithography by polymer fibers
We report on the use of polymer fibers for large-area soft nanolithography on organic and inorganic surfaces with 50 nm resolution. The morphology of fibers and of the corresponding patterned gap is investigated, demonstrating a lateral dimension downscaling of up to nine times, which greatly increa...
Saved in:
| Main Authors: | , , , , , , |
|---|---|
| Format: | Default Article |
| Published: |
2011
|
| Subjects: | |
| Online Access: | https://hdl.handle.net/2134/17815 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|