Modeling evaporation, ion-beam assist, and magnetron sputtering of thin metal films over realistic time scales

A long-time-scale dynamics technique has been used to model the evaporation, ion-beam assist, and magnetron sputtering of thin metal films over realistic time scales. Two fcc metals have been investigated: silver and aluminum. We illustrate how the technique can be used to model growth of these film...

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Bibliographic Details

Main Authors:	Sabrina Blackwell, Roger Smith, Steven Kenny, Michael Walls
Format:	Default Article
Published:	2012
Subjects:	Other mathematical sciences not elsewhere classified untagged Mathematical Sciences not elsewhere classified
Online Access:	https://hdl.handle.net/2134/11614
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