Modelling the growth of ZnO thin films by PVD methods and the effects of post-annealing

Results are presented for modelling of the evaporation and magnetron sputter deposition of Zn onto an O-terminated ZnO () wurtzite surface. Growth was simulated through a combination of molecular dynamics (MD) and an on-the-fly kinetic Monte Carlo (otf-KMC) method, which finds diffusion pathways and...

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Bibliographic Details
Main Authors: Sabrina Blackwell, Roger Smith, Steven Kenny, Michael Walls, Carlos F. Sanz-Navarro
Format: Default Article
Published: 2013
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Online Access:https://hdl.handle.net/2134/12070
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