Modelling the growth of ZnO thin films by PVD methods and the effects of post-annealing
Results are presented for modelling of the evaporation and magnetron sputter deposition of Zn onto an O-terminated ZnO () wurtzite surface. Growth was simulated through a combination of molecular dynamics (MD) and an on-the-fly kinetic Monte Carlo (otf-KMC) method, which finds diffusion pathways and...
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| Main Authors: | , , , , |
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| Format: | Default Article |
| Published: |
2013
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| Subjects: | |
| Online Access: | https://hdl.handle.net/2134/12070 |
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