Measurement of thin film interfacial surface roughness by coherence scanning interferometry

Coherence Scanning Interferometry (CSI), which is also referred to as scanning white light interferometry, is a well-established optical method used to measure the surface roughness and topography with sub-nanometer precision. One of the challenges CSI has faced is extracting the interfacial topogra...

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Bibliographic Details
Main Authors: Hiro Yoshino, Ali Abbas, Piotr M. Kaminski, Roger Smith, Michael Walls, D. Mansfield
Format: Default Article
Published: 2017
Subjects:
Mechanical engineering not elsewhere classified
Surface measurements
Thin film thickness
Topography
Silicon
Etching
Mechanical Engineering not elsewhere classified
Online Access:https://hdl.handle.net/2134/24605
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