Modeling the sputter deposition of thin film photovoltaics using long time scale dynamics techniques

Results are presented for modeling the deposition of Ag and rutile TiO2. The model can be used to examine the effect of varying experimental parameters, such as the substrate bias in the magnetron and the stoichiometry of the deposition species. We illustrate how long time scale dynamics techniques...

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Bibliographic Details

Main Authors:	Sabrina Blackwell, Roger Smith, Steven Kenny, Michael Walls
Format:	Default Article
Published:	2011
Subjects:	Other mathematical sciences not elsewhere classified Thin film Atomic layer deposition Simulation Mathematical Sciences not elsewhere classified
Online Access:	https://hdl.handle.net/2134/11621
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