Influence of ion assisted deposition on interface broadening in Fe/Al multilayers investigated by medium energy ion scattering

Trilayers of Al/Fe/Al and Al/Fe multilayers produced by magnetron sputtering both with and without ion assistance have been depth profiled using Auger electron spectroscopy and medium energy ion scattering. Important differences are observed in the layer structure, with ion assisted deposition givin...

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Bibliographic Details
Main Authors: Mohamed S.K. Al-Busaidy, P. Bailey, T.C.Q. Noakes, Michael Cropper
Format: Default Article
Published: 2009
Subjects:
Other physical sciences not elsewhere classified
Iron
Aluminium
Multilayer
MEIS
Magnetron
Depth profiling
Trilayer
Physical Sciences not elsewhere classified
Online Access:https://hdl.handle.net/2134/10741
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