Reactive filtered arc evaporation
Conventional physical vapour deposition (PVD) techniques usually result in films of lower quality than the corresponding bulk material. A major problem with PVD films is the presence of columns and voids throughout the thickness of the film. The films may have a low packing density, low micro-hardne...
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| Format: | Default Thesis |
| Published: |
1993
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| Online Access: | https://hdl.handle.net/2134/26797 |
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