Zone plate interferometers for verifying three coordinate measuring machines

This thesis is concerned with the use of zone plate interferometers for the precise location of position. The thesis begins by discussing the use of the zone plate as an optical component and examines the wavefront aberrations that can occur in higher orders of diffraction. Interferometers applicabl...

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Bibliographic Details
Main Author: Richard F. Stevens
Format: Default Thesis
Published: 1985
Subjects:
Online Access:https://hdl.handle.net/2134/25601
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