Absolute surface topography measurement with polarisation sensitive coherence scanning interferometry

Traditionally, surface topography measurement was in the domain of quality control of engineering parts. With the advancement of manufacturing technology and affordable computational costs, different types of surfaces are produced with varied shapes and surface textures. These pose significant measu...

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Bibliographic Details
Main Author: Kanik Palodhi
Format: Default Thesis
Published: 2013
Subjects:
Mechanical engineering not elsewhere classified
Coherence scanning interferometry (CSI)
Optical metrology
Surface topography
Surface roughness measurement
Point spread function
Three dimensional imaging
Mechanical Engineering not elsewhere classified
Online Access:https://hdl.handle.net/2134/14411
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https://hdl.handle.net/2134/14411

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