The characteristics and feasibility of an in-line debris control technique for KrF excimer laser ablative micromachining
To observe KrF excimer laser ablation through thin liquid film of de-ionized (DI) water and the effects thereof on debris control, equipment was designed to contain a small control volume that could be supplied with a fixed flow velocity thin film of DI water to immerse a bisphenol A polycarbonate w...
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| Format: | Default Thesis |
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2009
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| Online Access: | https://hdl.handle.net/2134/16774 |
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