Simulation and characterisation of electroplated micro-copper columns for electronic interconnection
Growth mechanism of electroplated copper columns has been systematically studied by simulations and characterizations. A two-dimensional cross-sectional kinetic Monte Carlo (2DCS-KMC) model has been developed to simulate the electrodeposition of single crystal copper. The evolution of the microstruc...
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| Format: | Default Thesis |
| Published: |
2010
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| Online Access: | https://hdl.handle.net/2134/6103 |
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