Simulation and characterisation of electroplated micro-copper columns for electronic interconnection

Growth mechanism of electroplated copper columns has been systematically studied by simulations and characterizations. A two-dimensional cross-sectional kinetic Monte Carlo (2DCS-KMC) model has been developed to simulate the electrodeposition of single crystal copper. The evolution of the microstruc...

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Bibliographic Details
Main Author: Jun Liu
Format: Default Thesis
Published: 2010
Subjects:
Online Access:https://hdl.handle.net/2134/6103
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